>> P.222
LSM-02-A/LSM-30-ASensorunitSpecificationsCodeNo.ModelMeasuringrangeResolutionRepeatability(2σ)*2Linearity*2Positionalerror*2*7FullrangeMiddlerangeMeasuringregionNumberofscansforaveragingLaserClassScanningrateLaserscanningspeedProtectionlevelDistancebetweentheemissionunitandreceptionunitOperatingenvironmentStoragetemperatureCEMarking/UKCAMarkingStandardaccessory544-123LSM-02-A0.005to2mm0.05to2mm*10.01µmø2mm:±0.03µm*3ø1mm:±0.015µm*3±0.3µm*5±0.4µm544-124LSM-30-A0.3to30mm0.01µmø30mm:±0.09µm*4ø10mm:±0.06µm*4Wholerange:±1.0µm*5Narrowrange:±(0.6+0.1⊿D)µm*5*6Fullrange(10×30):±1.8µmMiddlerange(5×20):±1.0µm1×2[opticalaxisdepth]×[scanningwidth]mm10×30[opticalaxisdepth]×[scanningwidth]mm16to2048scans*81to2048scansSemiconductorlaser:CLASS1(Max.output:1.0mW,Laserwavelength:650nm)76m/sー3200scans/sIP67226m/sStandard:130mm,Max.:350mmTemperature:0°Cto40°C,Humidity:35%RHto85%RH(non-condensing)Temperature:-10°Cto50°C,Humidity:35%RHto85%RH(non-condensing)Altitude:2000morlessEMCDirective:ENIEC61326-1,Immunitytestrequirements:Clause6.2Table2Emissionlimit:ClassARoHSDirective:ENIEC63000Signalcable:02AGQ190CD(User'sManual):02AGQ039*1Whensetto"Donotperformultra-finewiremeasurement"or"Edgespecification"inthebasicsetup.*2Accuracywasinspectedusingaglasssubstrateworkpiecewithavapor-depositedchromiumpattern.Environment:Temperature:20°C±1°C,Humidity:50%±10°C*3Valueof±2σwhenaø2mm/ø1mmgageismeasuredfortwominutesatmeasuringintervalsof0.32seconds(σ:standarddeviation)*4Valueof±2σwhenaø30mm/ø10mmgageismeasuredfortwominutesatmeasuringintervalsof0.32seconds(σ:standarddeviation)*5Valueobtainedbymeasurementatthemiddleofthemeasuringrange*6⊿D=Differenceindiameterbetweenthemastergageandworkpiece.(Unit:mm)*7Errorcausedbymovingaworkpieceeitherintheopticalaxisdirectionorinthescanningdirection*8Whensetto"Donotperformultra-finewiremeasurement"inthebasicsetup,onetoeighttimesofaveragingareavailablewithinthemeasuringrangeof0.05mmto2mm.5-9
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